Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC)
نویسندگان
چکیده
منابع مشابه
Structuration of the Low Temperature Co-fired Ceramics (ltcc) Using Novel Sacrificial Graphite Paste with Pva-propylene Glycol-glycerol-water Vehicle Structuration of the Low Temperature Co-fired Ceramics (ltcc) Using Novel Sacrificial Graphite Paste with Pva-propylene Glycol-glycerol-water Vehicle
A novel formulation for thick-film graphite sacrificial pastes is studied in this paper. It is composed of coarse graphite powder (grain size: 25 μm), dispersed in a vehicle consisting of polyvinyl alcohol (PVA) dissolved in a propylene glycol (PG) – glycerol (G) – water mix, which is not aggressive to thin LTCC sheets. The presented sacrificial paste has been successfully applied for fabricati...
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2006
ISSN: 0924-4247
DOI: 10.1016/j.sna.2005.12.009